展商
展品
OPUS3-SE
展商：SEMICS Inc.
原产国/地区：韩国
Opus3 SE is specialized in 6 & 8 inch wafer handling and it is optimized to compact foot print. It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.
展品详情
· Specialized in 6 & 8 inch wafer
· Space efficient foot print
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algorithm
| Name | OPUS3-SE |
| Wafer Size | 6 & 8 inch |
| Dimension | 1226(W) x 1350(D) x 860(H) |
| X, Y Probing Area | X : ±115mm/Y : ±115mm |
| Max Probing Force | 240kg |
| XY Accuracy | X : ±1.5㎛/Y : ±1.5㎛ |
| Tri-Temp | COLD: -40℃ / -55℃ HOT: 150℃ / 200℃ AMBIENT CONTROL (25℃) |