Si DRIE
展商：SPP Technologies Co., Ltd.
原产国/地区：日本
SPT offers two Si DRIE systems—Predeus and Proxion—designed for high-aspect-ratio deep silicon etching. Both platforms deliver stable, repeatable performance with excellent uniformity and process control, supporting a wide range of MEMS and advanced packaging applications.
展品详情
SPT offers two Si DRIE systems—Predeus and Proxion—designed for high-aspect-ratio deep silicon etching. Both platforms deliver stable, repeatable performance with excellent uniformity and process control, supporting a wide range of MEMS and advanced packaging applications.