OPUS3-ST
展商：SEMICS Inc.
原产国/地区：韩国
OPUS3 SH is the only prober in the market which handles 6”, 8” and 12” SEMI Standard wafers, without having any change kit. It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.
展品详情
OPUS3 ST is the only prober in the market which handles 12 inch SEMI standard wafers & 297mm wafers without having any change kit. It is compact with high accuracy for consistent probing capability It also provides optimized and fast wafer handling feature for higher wafer handling throughput. It is suitable for automation with a top loader.
| Name | OPUS3 ST |
| Wafer Size | 8 & 12 inch (6”option) |
| Dimension | 1700(W) x 2030(D) x 1380(H) |
| X, Y Probing Area | X : ±180mm/Y : ±175mm |
| Needle Force | 450kgf / *750kgf |
| XY Accuracy | X : +1.0㎛/Y : ±1.0㎛ |
| Tri-Temp | Standard : Room temperature to 150℃ |
| Option : -55℃, Ambient 25℃, 200℃ |