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Exhibitor Product

Si DRIE

Exhibitor：SPP Technologies Co., Ltd.

Country (Region) of Origin：Japan

SPT offers two Si DRIE systems—Predeus and Proxion—designed for high-aspect-ratio deep silicon etching. Both platforms deliver stable, repeatable performance with excellent uniformity and process control, supporting a wide range of MEMS and advanced packaging applications.

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Exhibit Details

SPT offers two Si DRIE systems—Predeus and Proxion—designed for high-aspect-ratio deep silicon etching. Both platforms deliver stable, repeatable performance with excellent uniformity and process control, supporting a wide range of MEMS and advanced packaging applications.